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掃描電子顯微學(xué)及在納米技術(shù)中的應(yīng)用

掃描電子顯微學(xué)及在納米技術(shù)中的應(yīng)用

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作 者: 周維列 王中林
出版社: 高等教育出版社
叢編項(xiàng): 當(dāng)代科學(xué)前沿論叢
標(biāo) 簽: 集成電路

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ISBN: 9787040190083 出版時(shí)間: 2007-03-01 包裝: 平裝
開(kāi)本: 16開(kāi) 頁(yè)數(shù): 450 字?jǐn)?shù):  

內(nèi)容簡(jiǎn)介

  在過(guò)去的10年中,納米技術(shù)的飛速發(fā)展使得掃描電子顯微鏡成為了一種分析和構(gòu)建新納米材料、結(jié)構(gòu)和器件不可缺少的有力的工具。新納米材料的發(fā)現(xiàn)需要通過(guò)先進(jìn)的分析技術(shù)和技能來(lái)獲取高質(zhì)量的圖片,從而幫助我們理解納米結(jié)構(gòu),以達(dá)到改進(jìn)合成方法和提高性能的目的。例如場(chǎng)發(fā)射槍、背散射電子的探測(cè)、X射線元素的圖像化等,已經(jīng)很大程度地提高了掃描電子顯微鏡在納米材料分析中的應(yīng)用。除了分析功能之外,掃描電子顯微鏡可以與最新發(fā)展起來(lái)的測(cè)控技術(shù)相結(jié)合,實(shí)行原位納米器件的加工、制造和性能表征。這些技術(shù)包括納米材料的操控、電子刻蝕、聚焦離子束微加工等。雖然這些技術(shù)仍在發(fā)展之中,但它們已開(kāi)始廣泛應(yīng)用于納米研究的各個(gè)領(lǐng)域。

作者簡(jiǎn)介

  周維列博士,1993年畢業(yè)于中國(guó)科學(xué)院物理研究所。1994一1997年先后在日本精密陶瓷材料研究所(JFCC)和美國(guó)凱斯西部保留大學(xué)(CWRU)從事電子顯微學(xué)博士后研究。1998年至今任美國(guó)新奧爾良大學(xué)(LJNO)先端材料研究所(AMRI)電鏡室主任。從事電子顯微鏡在材料中的應(yīng)用近20年,獲美國(guó)自然科學(xué)基金(NSF)和美國(guó)國(guó)防部先端研究項(xiàng)目(DARPA)等多項(xiàng)資助。現(xiàn)為美國(guó)電子顯微學(xué)會(huì)和材料學(xué)會(huì)會(huì)員。王中林博士,美國(guó)佐治亞理工學(xué)院(Georgia Institute of TechnoIogy)終身教授、校董事講席教授(Regents’Professor)、納米結(jié)構(gòu)表征和器件制造中心主任,中國(guó)國(guó)家納米科學(xué)中心海外主任,美國(guó)物理學(xué)會(huì)資深會(huì)員(Fellow)。榮獲美國(guó)顯微鏡學(xué)會(huì)1999年巴頓獎(jiǎng)?wù)?,佐治亞理工學(xué)院2000年和2005年杰出研究獎(jiǎng),2005年Sigma Xi學(xué)會(huì)持續(xù)研究獎(jiǎng),2001年S.T.Li獎(jiǎng)金(美國(guó)化學(xué)學(xué)會(huì)),美國(guó)自然科學(xué)基金會(huì)CAREER基金。他是1992:2002年10年中納米科技論文引用次數(shù)世界個(gè)人排名前25位作者之一,其學(xué)術(shù)論文已被引用10000次以上。

圖書(shū)目錄

Chapter 1 Fundamentals of Scanning Electron Microscopy
 1.1 Introduction
 1.2 Configuration of scanning electron microscopes
 1.3 Specimen preparation
 1.4 Conclusion
 References
Chapter 2 Electron Backscatter Diffraction(EBSD)Technique and Materials Characterization Examples
 2.1 Introduction
 2.2 Data measurement
 2.3 Data analysis
 2.4 Applications
 2.5 Current limitations and fur
 2.6 Conclusion
 References
Chapter 3 X-ray Microanalysis in Nanomaterials
 3.1 Introduction
 3.2 Monte Carlo modeling of nanomaterials
 3.3 Case studies
 3.4 Conclusion
 References
Chapter 4 Low kV Scanning Electron Microscopy
 4.1 IntrOductlon
 4.2 Electron generation and accelerating voltage
 4.3 Why use low kV?
 4.4 Using low kV
 4.5 Conclusion
 References
Chapter 5 E-beam Nanolithography Integrated with Scanning Electron Microscope
 5.1 Introduction
 5.2 Materials and processing preparation
 5.3 Pattern generation
 5.4 Pattern processing
 5.5 Applications
 5.6 Conclusion
 References
Chapter 6 Scanning Transmission Electron Microscopy for Nanostructure Characterization
 6.1 Introduction
 6.2 Imaging in the STEM
 6.3 Spectroscopic imaging
 6.4 Three-dimensional imaging
 6.5 Recent applications to nanostructure characterization
 6.6 Future directions
 References
Chapter 7 Introduction to ln-situ Nanomanipulation for Nanomaterials Engineering
 7.1 Introduction
 7.2 SEM Contamination
 7.3 Types of nanomanipulators
 7.4 End effectors
 7.5 Applications of nanomanipulators
 7.6 Conclusion
 References
Chapter 8 Applications of FIB and DualBeam for Nanofabrication
 8.1 Introductlon
 8.2 Onboard digital patterning with the ion beam
 8.3 FIB milling or CVD deposition with bitmap files
 8.4 Onboard digital patterning with the electron beam
 8.5 Automation for nanometer control
 8.6 Direct fabrication of nanoscale structures
 8.7 Conclusion
 References
Chapter 9 Nanowires and Carbon Nanotubes
 9.1 Introduction
 9.2 Ⅲ-V compound semiconductors nanowires
 9.3 Ⅱ-VI compound semiconductors nanowires
 9.4 Elemental nanowires
 9.5 Carbon nanotubes
 9.6 Conclusion
 References
Chapter 10 Photonic Crystals and Devices
 10.1 Introduction
 10.2 SEM imaging of photonic crystals
 10.3 Fabrication of photonic crystals in SEM
 10.4 Conclusion
 References
Chapter 11 Nanoparticles and Colloidal Self-assembly
 11.1 Introduction
 11.2 Metallic nanoparticles
 11.3 Mesoporous and nanoporous metal nanostructures
 11.4 Nanocrvstalline oxides
 11.5 Nanostructured semiconductor and thermoelectric materials
 11.6 Conclusion
 References
Chapter 12 Nano-building Blocks Fabricated through Templates
 12.1 Introduction
 12.2 Materials and methods
 12.3 Nano-building blocks
 12.4 Conclusion
 References
Chapter 13 One-dimensional Wurtzite Semiconducting Nanostructures
 13.1 Introduction
 13.2 Synthesis and fabrication of one—dimensional nanostructures
 13.3 One-dimensional metal oxide nanostructures
 13.4 Growth mechanisms
 13.5 Conclusion
 References
Chapter 14 Bio-inspired Nanomaterials
 14.1 Introduction
 14.2 Nanofibers
 14.3 Nanoparticles
 14.4 Surface modification
 14.5 Conclusion
 References
Chapter 15 Cryo-Temperature Stages in Nanostructural Research
 15.1 Introduction
 15.2 Terminology used in cryo-HRSEM of aqueous systems
 15.3 Liquid water,ice,and vitrified water
 15.4 History of 10W temperature SEM
 15.5 Instrumentation and methods
 References

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