List of Contributors Confocal Scanning Optical Microscopy and Nanotechnology 1.1 Introduction 1.2 The Confocal Microscope 1.2.1 Principles of Confocal Microscopy 1.2.2 Instrumentation 1.2.3 Techniques for Improving Imaging of Nanoscale Materials 1.3 Applications to Nanotechnology 1.3.1 Three-Dimensional Systems 1.3.2 Two-Dimensional Systems 1.3.3 One-Dimensional Systems 1.3.4 Zero-Dimensional Systems 1.4 Summary and Future Perspectives References 2 Scanning Near-Field Optical Microscopy in Nanosciences 2.1 Scanning Near-Field Optical Microscopy and Nanotechnology ... 2.2 Basic Concepts 2.3 Instrumentation 2.3.1 Probe Fabrication 2.3.2 Flexibility of Near-Field Measurements 2.4 Applications in Nanoscience 2.4.1 Fluorescence Microscopy 2.4.2 Raman Microscopy 2.4.3 Plasmonic and Photonic Nanostructures 2.4.4 Nanolithography 2.4.5 Semiconductors 2.5 Perspectives References Scanning Tunneling Microscopy 3.1 Basic Principles of Scanning Tunneling Microscopy 3.1.1 Electronic Tunneling 3.1.2 Scanning Tunneling Microscope 3.2 Surface Structure Determination by Scanning Tunneling Microscopy 3.2.1 Semiconductor Surfaces 3.2.2 Metal Surfaces 3.2.3 Insulator Surfaces 3.2.4 Nanotubes and Nanowires 3.2.5 Surface and Subsurface Dynamic Processes 3.3 Scanning Tunneling Spectroscopies 3.3.1 Scanning Tunneling Spectroscopy 3.3.2 Inelastic Tunneling Spectroscopy 3.3.3 Local Work Function Measurement 3.4 STM-Based Atomic Manipulation 3.4.1 Manipulation of Single atoms 3.4.2 STM Induced Chemical Reaction at Tip 3.5 Recent Developments 3.5.1 Spin-Polarized STM 3.5.2 Ultra-Low Temperature-STM 3， 5.3 Dual-Tip STM 3.5.4 Variable Temperature Fast-Scanning STM References 4 Visualization of Nanostructures with Atomic Force Microscopy 4.1 Introductory Remarks 4.2 Basics of Atomic Force Microscopy 4.2.1 Main Principle and Components of Atomic Force Microscope 4.2.2 Operational Modes， Optimization of the Experimen! and Image Resolution 4.2.3 Imaging in Various Environments and at Different Temperatures 4.3 Imaging of Macromolecules and Their Self-Assemblies 4.3.1 Visualization of Single Polymer Chains 4.3.2 Alkanes， Polyethylene and Fluoroalkanes 4.4 Studies of Heterogeneous Systems 4.4.1 Semicrystalline Polymers 4.4.2 Block Copolymers 4.4.3 Polymer Blends and Nanocomposites 4.5 Concluding Remarks References 5 Scanning Probe Microscopy for Nanoscale Manipulation and Patterning 5.1 Introduction 5.1.1 Nanoscale Toolbox for Nanotechnologists 5.1.2 Motivations 5.2 Nanoscale Pen Writing 5.2.1 Dip-Pen Nanolithography 5.2.2 Nanoscale Printing of Liquid Ink 5.3 Nanoscale Scratching 5.3.1 Nanoscale Indentation 5.3.2 Nanografting 5.3.3 Nanoscale Melting 5.4 Nanoscale Manipulation 5.4.1 Atomic and Molecular Manipulation 5.4.2 Manipulation of Nanostructures 5.4.3 Nanoscale Tweezers 5.5 Nanoscale Chemistry 5.5.1 Nanoscale Oxidation 5.5.2 Nanoscale Desorption of Self-Assembled Monolayers 5.5.3 Nanoscale Chemical Vapor Deposition 5.6 Nanoscale Light Exposure 5.7 Future Perspectives References 6 Scanning Thermal and Thermoelectric Microscopy 6.1 Introduction 6.2 Instrumentation of Scanning Thermal and Thermoelectric Microscopy 6.2.1 Instrumentation of Scanning Thermal Microscopy 6.2.2 Instrumentation of Scanning Thermoelectric Microscopy 6.3 Theory of Scanning Thermal and Thermoelectric Microscopy 6.3.1 Theory of Scanning Thermal Microscopy 6.3.2 Theory of Scanning Thermoelectric Microscopy 6.4 Applications of Scanning Thermal and Thermoelectric Microscopy in Nanotechnology 6.4.1 Thermal Imaging of Carbon Nanotube Electronics 6.4.2 Thermal Imaging of ULSI Devices and Interconnects 6.4.3 Shallow Junction Profiling 6.5 Summary and Future Aspects References Imaging Secondary Ion Mass Spectrometry 7.1 Secondary Ion Mass Spectrometry and Nanotechnology 7.2 Introduction to Secondary Ion Mass Spectrometry 7.2.1 Ove~rview 7.2.2 General SIMS Instruments 7.2.3 High Resolution Imaging SIMS Instruments 7.3 Experimental Issues in Imaging SIMS 7.4 Applications in Nanotechnology 7.4.1 Example--Precipitate Distributions in Metallurgy 7.4.2 Example--Heterogeneous Catalyst Studies 7.4.3 Example--Nanoscale Biological Structures 7.5 Summary and Future Perspectives References 8 Atom Probe Tomography 8.1 Atom Probe Tomography and Nanotechnology 8.2 Instrumentation of Atom Probe Tomography 8.2.1 Field Ion Microscope 8.2.2 Types of Atom Probe 8.2.3 Specimen Preparation 8.3 Basic Information 8.4 Data Interpretation and Visualization 8.4.1 Visualization Methods 8.4.2 Quantification Methods 8.5 Sample Analysis of Nanomaterials： Multilayer Films 8.6 Summary and Future Perspectives References 9 Focused Ion Beam System--a Multifunctional Tool for Nanotechnology 9. 1 Introduction 9.2 Principles and Practice of the Focused Ion Beam System 9.2.1 Ion Beam Versus Electron Beam 9.2.2 Focused Ion Beam Microscope Versus Scanning Electron Microscope 9.2.3 Milling 9.2.4 Deposition 9.2.5 Implantation 9.2.6 Imaging 9.2.7 The Dual-Beam System 9.3 Application of Focused Ion Beam Instrumentation 9.3.1 Surface Structure Modification 9.3.2 Transmission Electron Microscopy Sample preparation for imaging and analysis 9.3.3 Sample Imaging--Defining the Third Dimension 9.3.4 Damage to the Sample Induced by the Focused Ion Beam References 10 Electron Beam Lithography 10.1 Electron Beam Lithography and Nanotechnology 10.2 Instrumentation of Electron Beam Lithography 10.2.1 Principle 10.2.2 Electron Optics 10.3 Electron-Solid Interactions 10.3.1 Electron Scattering in Solid 10.3.2 Proximity Effect 10.3.3 Electron Beam Resists 10.4 Pattern Transfer Process 10.4.1 Additive Processes 10.4.2 Subtractive Processes 10.5 Applications in Nanotechnology 10.5.1 Mask Making 10.5.2 Direct Writing 10.6 Summary and Future Perspectives References Index
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