1High\|Resolution Scanning Electron Microscopy1 1.1Introduction: Scanning Electron Microscopy and Nanotechnology1 1.2Electron\|Specimen Interactions5 1.2.1Electron\|Specimen Interactions in Homogeneous Materials6 1.2.2Electron\|Speciment Interactions in Composite Samples8 1.3Instrumentation of/the Scanning Electron Microscope10 1.3.1General Description10 1.3.2Performance of a Scanning Electron Microscope13 1.4The Resolution of Secondary and Backscattered Electron Images18 1.5Contrast Mechanisms of SE and BE Images of Nanoparticles and Other Systems21 1.5.1Small Particle Contrast in High\|Resolution BE Images22 1.5.2Small Particle Contrast in High\|Resolution SE Images25 1.5.3Other Contrast Mechanisms28 1.6Applications to Characterizing Nanophase Materials29 1.7Summary and Perspectives32 References352High Spatial Resolution Quantitative Electron Beam Microanalysis for Nanoscale Materials37 2.1Introduction 37 2.2The Nanomaterials Characterization Challenge: Bulk Nanostructures and Discrete Nanoparticles37 2.2.1Bulk Nanostructures38 2.2.2Nanoparticles40 2.3Physical Basis of the Electron\|Excited Analytical Spectrometries40 2.4Nanoscale Elemental Characterization with High Electron Beam Energy42 2.4.1EELS42 2.4.2X\|ray Spectrometry48 2.5Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy55 2.5.1Intermediate Beam Energy X\|ray Microanalysis56 2.5.2Low Beam Energy X\|ray Microanalysis: Bulk Nanostructures59 2.5.3Auger Spectrometry62 2.5.4Elemental Mapping65 2.6Examples of Applications to Nanoscale Materials65 2.6.1Analytical Electron Microscopy65 2.6.2Low Voltage SEM69 2.6.3Auger/X\|ray SEM73 2.7Conclusions73 References743Characterization of Nano\|Crystalline Materials Using Electron Backscatter Diffraction in the Scanning Electron Microscope77 3.1Introduction77 3.2Historical Development of EBSD78 3.3Origin of EBSD Patterns79 3.3.1Collection of EBSD Patterns80 3.3.2Automated Orientation Mapping83 3.4Resolution of EBSD84 3.4.1Lateral Resolution84 3.4.2Depth Resolution88 3.5Sample Preparation of Nano\|Materials for EBSD88 3.6Applications of EBSD to Nano\|Materials89 3.6.1Heteroepitaxy of Boron Arsenide on \[0001\] 6H\|Sic89 3.6.2Electrodeposited Ni for MEMS Applications91 3.6.3Polycrystalline Si For MEMS Applications93 3.7Summary95 References954High Resolution Transmission Electron Microscopy97 4.1HRTEM and Nanotechnology97 4.2Principles and Practice of HRTEM97 4.2.1Basis of Image Formation97 4.2.2Definitions of Resolution99 4.2.3Lattice Imaging or Atomic Imaging101 4.2.4Instrumental Parameters102 4.2.5Further Requirements103 4.2.6Milestones104 4.3Applications of HRTEM105 4.3.1Semiconductors105 4.3.2Metals107 4.3.3Oxides and Ceramics110 4.3.4Surfaces112 4.3.5Dynamic Events113 4.4Current Trends114 4.4.1Image Viewing and Recording114 4.4.2On\|Line Microscope Control115 4.4.3Detection and Correction of Third\|Order Aberrations116 4.4.4Quantitative HRTEM117 4.4.5Aberration\|Corrected HRTEM118 4.5Ongoing Problems119 4.5.1The Stobbs’ Factor119 4.5.2Radiation Damage120 4.5.3Inversion of Crystal Scattering120 4.6Summary and Future Perspective121 References1215Scanning Transmission Electron Microscopy127 5.1Introduction127 5.2STEM Imaging131 5.3STEM Imaging of Crystals138 5.3.1Very Thin Crystals138 5.3.2Dynamical Diffraction Effects140 5.3.3Channeling141 5.4Diffraction in STEM Instruments142 5.4.1Scanning Mode Electron Diffraction142 5.4.2Two\|Dimensional Recording Systems142 5.4.3Convergent\|Beam Electron Diffraction143 5.4.4Coherent Nanodiffraction145 5.5Microanalysis in STEM146 5.5.1Electron Energy Loss Spectroscopy and Imaging146 5.5.2Secondary Emissions146 5.6Studies of Nanoparticles and Nanotubes147 5.6.1Nanoparticles147 5.6.2Nanotubes and Nanoshells148 5.7Studies of Crystal Defects and Interfaces150 5.8The Structure and Composition of Surfaces152 5.8.1Ultra\|High Vacuum Instruments152 5.8.2Reflection Electron Microscopy152 5.8.3Surface Channeling Effects154 5.8.4MEED and MEEM154 5.9Amorphous Materials154 5.9.1Thin Quasi\|Amorphous Films154 5.9.2Thick Amorphous Films155 5.10STEM Holography156 5.10.1Gabor’s In\|Line Holography156 5.10.2Off\|Axis Holography157 5.11Ultra\|High\|Resolution STEM159 5.11.1Atomic Focusers159 5.11.2Aberration Correction159 5.11.3Combining Nanodiffraction and Imaging161 5.12Conclusions162 References1636In\|situ Electron Microscopy for Nanomeasurements169 6.1Introduction169 6.2Thermal Induced Surface Dynamic Processes of Nanocrystals169 6.3Measuring Dynamic Bending Modulus by Electric Field Induced Mechanical Resonance171 6.3.1Young’s Modulus Measured by Quantifying Thermal Vibration Amplitude171 6.3.2Bending Modulus by Electric Field Induced Mechanical Resonance173 6.4Young’s Modulus of Composite Nanowires181 6.5Bending Modulus of Oxide Nanobelts184 6.5.1Nanobelts184 6.5.2Dual\|mode Resonance of Nanobelts185 6.5.3Bending Modulus of Nanobelt187 6.6Nanobelts as Nanocantilevers188 6.7In\|situ Field Emission from Nanotube189 6.8Work Function at the Tips of Nanotubes and Nanobelts190 6.9Mapping the Electrostatic Potential at the Nanotube Tips193 6.10Field Emission Induced Structural Damage195 6.11Nanothermometer and Nanobearing197 6.12In\|situ Transport Measurement of Nanotubes197 6.12.1Ballistic Quantum Conductance at Room Temperature197 6.12.2Quantum Conductance and Surface Contamination199 6.12.3Top Layer Transport in MWNT203 6.13Summary204 References2057Environmental Transmission Electron Microscopy in Nanotechnology209 7.1Introduction209 7.2History of ETEM211 7.2.1Early Developments211 7.2.2Later Developments and Current Status212 7.3Data Collection215 7.3.1Real\|Time Imaging Systems215 7.3.2Spectroscopy and Chemical Analysis217 7.4Experimental Design Strategies218 7.5Applications to Nanomaterials220 7.5.1Transformation Mechanisms in Nanostructures due to Gas\|solid Reactions220 7.5.2Controlled Synthesis of Nanostructures229 7.5.3Kinetics233 7.6Conclusions239 References2408Electron Nanocrystallography243 8.1Introduction 243 8.2Electron Diffraction Modes and Geometry244 8.2.1Selected Area Electron Diffraction245 8.2.2Nano\|Area Electron Diffraction246 8.2.3Convergent Beam Electron Diffraction247 8.3Theory of Electron Diffraction249 8.3.1Kinematic Electron Diffraction and Electron Atomic Scattering249 8.3.2Kinematical Electron Diffraction from an Assembly of Atoms251 8.3.3Geometry of Electron Diffraction from Perfect Crystals254 8.3.4The Geometry of a CBED Pattern257 8.3.5Electron Dynamic Theory— the Bloch Wave Method257 8.4Experimental Analysis260 8.4.1Experimental Diffraction Pattern Recording260 8.4.2The Phase Problem and Inversion262 8.4.3The Refinement Technique263 8.4.4Electron Diffraction Oversampling and Phase Retrieval for Nanomaterials267 8.5Applications to Nanostructure Characterization268 8.5.1Structure Determination of Individual Single\|Wall Carbon Nanotubes268 8.5.2The Structure of Supported Small Nanoclusters and Epitaxy271 8.5.3Crystal Charge Density273 8.6Conclusions and Future Perspectives275 References2759Tomography Using the Transmission Electron Microscope279 9.1Introduction279 9.2Tomography281 9.2.1A History of Tomography281 9.2.2The Radon Transform282 9.2.3The Central Slice Theorem and Fourier Space Reconstruction283 9.2.4Real Space Reconstruction Using Backprojection284 9.3Tomography in the Electron Microscope287 9.3.1Acquisition287 9.3.2Alignment288 9.3.3Anisotropic Resolution289 9.3.4The Projection Requirement292 9.4STEM HAADF Tomography293 9.5EFTEM Tomography299 9.6Conclusions302 References30310Off\|Axis Electron Holography307 10.1Electron Holography and Nanotechnology307 10.2Description of Off\|Axis Electron Holography308 10.2.1Experimental Set\|up308 10.2.2Basic Imaging Theory and Hologram Reconstruction310 10.2.3Phase Shifts and Mean Inner Potential312 10.2.4Quantification314 10.2.5Practical Considerations315 10.3Nanoscale Electrostatic Fields316 10.3.1Dopant Profiles317 10.3.2Piezoelectric Fields317 10.3.3Charged Defects318 10.3.4Field\|Emitting Carbon Nanotubes320 10.3.5Thickness and Sample Morphology321 10.4Nanoscale Magnetic Fields321 10.4.1Patterned Nanostructures322 10.4.2Nanoparticle Chains325 10.5Future Perspectives327 References32811Sub\|nm Spatially Resolved EELS(Electron Energy\|Loss Spectroscopy): Methods,Theory and Applications331 11.1Introduction: EELS and Nanotechnology331 11.2Understanding the Information Contained in an EELS Spectrum332 11.2.1Definition of an EELS Spectrum and of the Basic Information Which It Contains332 11.2.2Basic Tools Developed for Interpreting and Using Core\|Loss Signals336 11.3Spatially Resolved EELS341 11.3.1The 3D Data Cube341 11.3.2Instrumentation Required for Recording the 3D Data Cube,Definition and Estimate of the Spatial and Energy Resolutions343 11.4Elemental Mapping of Individual Nanoparticles Using Core\|loss Signals348 11.4.1Data Processing Routines: Background Subtraction, Multiple Least Square Fitting348 11.4.2A Few Examples of Elemental Mapping with EELS Core Edges350 11.4.3Sensitivity,Limits of Detection in EELS Elemental Mapping352 11.5Mapping Bonding States and Electronic Structures with ELNES Features352 11.5.1A Few Selected Examples353 11.5.2From Fingerprint Techniques to Interpretations Requiring Extended Theoretical Calculations355 11.6Conclusions357 References35712Imaging Magnetic Structures Using TEM361 12.1Introduction361 12.2Lorentz Microscopy362 12.2.1Introduction362 12.2.2Magnetic\|Shield Lens362 12.2.3Deflection Angle Due to Lorentz Force363 12.2.4Fresnel Mode364 12.2.5Foucault Mode371 12.2.6Lorentz Phase Microscopy372 12.3Electron Holography376 12.3.1Introduction376 12.3.2Observation of Single Magnetic Domain Particles377 12.3.3Real\|time Observation377 12.3.4High\|precision Observation381 12.4Summary392 References392Index395
鄂公網(wǎng)安備 42010302001612號 