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表面和薄膜過(guò)程導(dǎo)論

表面和薄膜過(guò)程導(dǎo)論

定 價(jià):¥76.00

作 者: (英)John A.Venables著
出版社: 世界圖書(shū)出版公司北京公司
叢編項(xiàng):
標(biāo) 簽: 薄膜技術(shù)

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ISBN: 9787506265553 出版時(shí)間: 2003-01-01 包裝: 膠版紙
開(kāi)本: 22cm 頁(yè)數(shù): 372頁(yè) 字?jǐn)?shù):  

內(nèi)容簡(jiǎn)介

  表面和薄膜科學(xué)是微電子、光電子和磁工業(yè)的物理基礎(chǔ),是現(xiàn)代社會(huì)技術(shù)進(jìn)步的科學(xué)保證。在微觀以至原子水平上研究和操縱表面讓我們能夠理解許多具有重要技術(shù)意義之器件的制作與運(yùn)行。本書(shū)關(guān)注發(fā)生在表面和薄膜中的物理過(guò)程,詳細(xì)介紹了與表面和薄膜相關(guān)的物理過(guò)程,包括熱力學(xué)與運(yùn)動(dòng)學(xué)的理論基礎(chǔ),潔凈表面的制備和表面的表征與分析技術(shù),表面吸附與脫附過(guò)程,金屬和半導(dǎo)體表面性質(zhì),外延生長(zhǎng)和薄膜器件的表面過(guò)程等等內(nèi)容。本書(shū)是作者積長(zhǎng)期在歐洲和美國(guó)的大學(xué)從事電子顯微學(xué)和表面科學(xué)的研究與教學(xué)實(shí)踐的豐富經(jīng)驗(yàn)而寫(xiě)成的,是一本優(yōu)秀的研究生教科書(shū)。本書(shū)敘述條理清楚,語(yǔ)言流暢,每章末有習(xí)題和相關(guān)的參考文獻(xiàn),書(shū)末給出了大量的參考文獻(xiàn),附錄中介紹了查閱相關(guān)資料的互聯(lián)網(wǎng)網(wǎng)址。讀者對(duì)象:物理學(xué)、化學(xué)、材料科學(xué)和材料工程方面的科研人員和研究生。此書(shū)為英文版!

作者簡(jiǎn)介

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圖書(shū)目錄

Preface
Chapter 1 Introduction to surface processes
1.1 Elementary thermodynamic ideas of surfaces
1.2 Suface energies and the Wulff throrem
1.3 Thermodynamics versus kinetics
1.4 Introduction to surface and adsorbate reconstructions
1.5 Introduction to surface electronics
Further reading for chapter1
Problems for chapter 1
Chapter 2 Surfaces in vacuum ultra-high vacuum techniques and processes
2.1 Kinetic thery concepts
2.2 Vacum concepts
2.3 UHV hardware:pumps,tubes,materials and pressure measureent
2.4 Surface rpeparation and cleaning procedures in situ experiments
2.5 Thin film deposition procedures:sources of information
Further reading for chapter2
Problems for chapter2
Chapter 3 Electron-based techniques for examinnig surface and thin film processes
3.1 Classification of suface and microsopy techniques
3.2 Diffraction and quasi-elastie scattering techniques
3.3 Inlastic scattering techniques;chemical and electronic state information
3.4 Quantification of Auger spectra
3.5 Microsopy-spectroscopy SEM SAM SPM etc.
Further reading for chapter3
Problems talks and projects for chapter 3
Chapter 4 Surface processes in adsorption
Chapter 5 Surface processes in epitaxial growth
Chapter 6 Electronic structure and processes at metalic surfaces
Chapter 7 Semiconductor surfaces and interfaces
Chapter 8 Surface procces in thin film devices
Chapter 9 Postscript-where do we go from here?
Rerferences
Index

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