Chapter 1 Semiconductors Physics 1.1 Energy Bands and Carrier Concentration 1.2 Carrier Transport Phenomena 1.3 PN Junction 1.4 Summary 參考文獻(xiàn) Chapter 2 Semiconductor Device 2.1 Bipolar Junction Transistor 2.2 The MOSFET 2.3 Microwave and Photonie Devices 2.4 Summary 參考文獻(xiàn) Chapter 3 Processing Tedmology 3.1 Crystal Growth and Epitaxy 3.2 Crystal Growth from the Melt 3.3 Vaper-Phase Epitaxy 3.4 Oxidation and Film Deposition 3.5 Diffusion and Ion Implantation 3.6 Lithographies 3.7 Wet Chemical Etching 3.8 Dry Etching 3.9 Integrated Devices 3.10 Fundamental Limits of Integrated Devices 參考文獻(xiàn) Chapter 4 Integrated Circuits 4.1 Introduction 4.2 Design Analysis and Simulation 4.3 Verification 4.4 Sunmaary 參考文獻(xiàn) Chapter 5 Microelectromechanical Systems (MEMS) 5.1 Introduction 5.2 MEMS 5.3 Mechanical Characteristics of Silicon 5.4 Micmfabrications for MEMS 5.5 Micmsensing for MEMS 5.6 Electmmechanical Actuation 5.7 Materials for MEMS 參考文獻(xiàn) Chapter 6 Examples of Scientific and Technological Papers 6.1 The Challenges for Physical Limitations in Si Microelectrc 6.2 Microelectronics and Photonlcs - the Future 6.3 Accelerated Verification of Digital Devices Using VHDL 6.4 What Is Nanoteehnology 參考文獻(xiàn)
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